Patent Assignment
Reel/Frame 026762/0852
Assignment of Assignor's Interest
Recorded: 2011-08-17
Pages: 8
Assignors
WADA, NOBUHIRO
Executed: 2011-07-03
KOBAYASHI, MAKOTO
Executed: 2011-08-08
TSUJIMOTO, HIROSHI
Executed: 2011-07-07
TAMURA, JUN
Executed: 2011-07-14
NAOI, MAMORU
Executed: 2011-07-25
OYABU, JUN
Executed: 2011-07-28
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus