Assignment of Assignor's Interest

Recorded: 2011-08-17 Pages: 4

Assignors

KEMEN, THOMAS

Executed: 2011-05-16

KNIPPELMEYER, RAINER

Executed: 2011-05-28

SCHUBERT, STEFAN

Executed: 2011-05-16

Assignees

APPLIED MATERIALS ISRAEL, LTD.

9 OPPENHEIMER STREET, REHOVOT, 76705, ISRAEL

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Charged Particle Inspection Method and Charged Particle System

Application: 11/991,547 →

Publication: US 2009/0256075

Related Assignments (2)

Other recorded transfers of the patent in this record — the chain of ownership.