Patent Assignment
Reel/Frame 026764/0162
Assignment of Assignor's Interest
Recorded: 2011-08-17
Pages: 3
Assignor
YAMAZAKI, SHUNPEI
Executed: 2011-07-26
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Electronic Device, Manufacturing Method of Electronic Device, and Sputtering Target