Patent Assignment
Reel/Frame 026765/0530
Assignment of Assignor's Interest
Recorded: 2011-08-17
Pages: 3
Assignor
ASAI, KAZUHIDE
Executed: 2011-07-29
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing System, Substrate Processing Apparatus and Display Method of Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.