Patent Assignment
Reel/Frame 026793/0660
Assignment of Assignor's Interest
Recorded: 2011-08-23
Pages: 3
Assignor
PIPER, DANIEL
Executed: 2011-08-11
Assignee
WAFERTECH, LLC
5509 N.W. PARKER STREET, CAMAS, WASHINGTON, 98607
Covered Property
(1)
Test Structure and Method for Determining Overlay Accuracy in Semiconductor Devices Using Resistance Measurement