Patent Assignment
Reel/Frame 026806/0042
Assignment of Assignor's Interest
Recorded: 2011-08-25
Pages: 4
Assignors
YASUI, TAKESHI
Executed: 2011-06-23
HIROCHI, YUKITOMO
Executed: 2011-06-23
TAKANO, SATOSHI
Executed: 2011-06-23
HORII, RITSUO
Executed: 2011-06-23
KAWABATA, MAKOTO
Executed: 2011-06-23
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.