Patent Assignment
Reel/Frame 026809/0250
Assignment of Assignor's Interest
Recorded: 2011-08-25
Pages: 3
Assignee
MITSUI ENGINEERING & SHIPBUILDING CO., LTD.
6-4, TSUKIJI 5-CHOME, CHUO-KU, TOKYO, 104-8439, JAPAN
Covered Property
(1)
Atomic Layer Deposition Apparatus and Thin Film Forming Method