Patent Assignment
Reel/Frame 026814/0218
Assignment of Assignor's Interest
Recorded: 2011-08-26
Pages: 10
Assignors
PAPASOULIOTIS, GEORGE D.
Executed: 2011-08-26
HADIDI, KAMAL
Executed: 2011-07-15
MAYNARD, HELEN L.
Executed: 2011-07-19
GODET, LUDOVIC
Executed: 2011-07-14
SINGH, VIKRAM
Executed: 2011-07-12
MILLER, TIMOTHY J.
Executed: 2011-07-14
LINDSAY, BERNARD
Executed: 2011-08-22
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Techniques for Plasma Processing a Substrate