Patent Assignment
Reel/Frame 026818/0850
Assignment of Assignor's Interest
Recorded: 2011-08-26
Pages: 4
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO 101-8980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Processing Tube, Substrate Holder, Fixing Part of the Substrate Holder, Substrate Processing Method, and Substrate Manufacturing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.