Patent Assignment
Reel/Frame 026830/0964
Assignment of Assignor's Interest
Recorded: 2011-08-30
Pages: 12
Assignors
DZIURA, THADDEUS G.
Executed: 2011-07-20
CHUANG, YUNG-HO
Executed: 2011-07-20
TSAI, BIN-MING BENJAMIN
Executed: 2011-07-19
LIU, XUEFENG
Executed: 2011-08-10
HENCH, JOHN J.
Executed: 2011-08-15
Assignees
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATOKU, 107-6325, JAPAN
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Optimizing an Optical Parametric Model for Structural Analysis Using Optical Critical Dimension (Ocd) Metrology
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.