Patent Assignment
Reel/Frame 026836/0932
Assignment of Assignor's Interest
Recorded: 2011-08-31
Pages: 4
Assignors
SASAGAWA, NORIHIKO
Executed: 2011-08-23
INADA, HIROICHI
Executed: 2011-08-23
TAKIGUCHI, YASUSHI
Executed: 2011-08-23
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Liquid Processing Apparatus, Liquid Processing Method and Storage Medium