Patent Assignment
Reel/Frame 026845/0374
Assignment of Assignor's Interest
Recorded: 2011-09-01
Pages: 3
Assignors
SHAO, YAN
Executed: 2011-09-01
TABAT, MARTIN D.
Executed: 2011-08-31
OLSEN, CHRISTOPHER K.
Executed: 2011-08-31
MACCRIMMON, RUAIRIDH
Executed: 2011-08-31
Assignee
TEL EPION INC.
37 MANNING ROAD, BILLERICA, MASSACHUSETTS, 01821
Covered Property
(1)
Gas Cluster Ion Beam Etching Process for Metal-Containing Materials
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.