Patent Assignment
Reel/Frame 026856/0150
Assignment of Assignor's Interest
Recorded: 2011-09-06
Pages: 2
Assignors
OTSUKA, NOBUYUKI
Executed: 2011-05-31
YANAGIHARA, MANABU
Executed: 2011-06-03
NAGAI, SHUICHI
Executed: 2011-05-31
UEDA, DAISUKE
Executed: 2011-05-31
Assignee
PANASONIC CORPORATION
1006 OAZA KADOMA, KADOMA-SHI, OSAKA, 571-8501, JAPAN
Covered Property
(1)
Semiconductor Equipment and Method of Manufacturing the Same