Patent Assignment
Reel/Frame 026856/0386
Assignment of Assignor's Interest
Recorded: 2011-09-06
Pages: 17
Assignors
CHUNG, HUA
Executed: 2011-04-29
DONG, XIZI
Executed: 2011-04-29
MAUNG, KYAWWIN JASON
Executed: 2011-05-02
HANAWA, HIROJI
Executed: 2011-05-02
KANG, SANG WON
Executed: 2011-05-04
QUACH, DAVID H.
Executed: 2011-05-02
OLGADO, DONALD J.K.
Executed: 2011-05-02
BOUR, DAVID
Executed: 2011-05-08
HSU, WEI-YUNG
Executed: 2011-05-03
TAM, ALEXANDER
Executed: 2011-04-29
CHANG, ANZHONG
Executed: 2011-05-03
ACHARYA, SUMEDH
Executed: 2011-05-10
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Method and Apparatus for Inducing Turbulent Flow of a Processing Chamber Cleaning Gas