Patent Assignment
Reel/Frame 026865/0925
Assignment of Assignor's Interest
Recorded: 2011-09-07
Pages: 3
Assignors
FUKUSHIMA, MAKOTO
Executed: 2011-09-01
WATANABE, KATSUHIDE
Executed: 2011-09-01
YASUDA, HOZUMI
Executed: 2011-09-01
YAMAKI, SATORU
Executed: 2011-09-01
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU,, TOKYO, JAPAN
Covered Property
(1)
Polishing Apparatus Having Thermal Energy Measuring Means