Patent Assignment
Reel/Frame 026868/0938
Assignment of Assignor's Interest
Recorded: 2011-09-07
Pages: 2
Assignors
MARAKHTANOV, ALEXEI
Executed: 2011-09-06
DHINDSA, RAJINDER
Executed: 2011-09-06
HUDSON, ERIC
Executed: 2011-09-06
BAILEY, ANDREW D, III
Executed: 2011-09-06
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Pulsed Plasma Chamber in Dual Chamber Configuration
Application:
13/227,404 →
Publication:
US 2013/0059448