Patent Assignment
Reel/Frame 026870/0714
Assignment of Assignor's Interest
Recorded: 2011-09-08
Pages: 5
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Laser-Produced Plasma Euv Source with Reduced Debris Generation Utilizing Predetermined Non-Thermal Laser Ablation