Patent Assignment
Reel/Frame 026870/0929
Assignment of Assignor's Interest
Recorded: 2011-09-08
Pages: 2
Assignee
CANON ANELVA CORPORATION
2-5-1 KURIGI, ASAO-KU, KAWASAKI-SHI, 215-8550, JAPAN
Covered Property
(1)
Plasma Processing Device, Plasma Processing Method and Method of Manufacturing Element Including Substrate to Be Processed