Patent Assignment
Reel/Frame 026872/0032
Assignment of Assignor's Interest
Recorded: 2011-09-08
Pages: 7
Assignors
SASAJIMA, RYOTA
Executed: 2011-08-29
HIROSE, YOSHIRO
Executed: 2011-08-29
AKAE, NAONORI
Executed: 2011-08-30
KASAHARA, OSAMU
Executed: 2011-08-31
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.