Patent Assignment
Reel/Frame 026874/0033
Assignment of Assignor's Interest
Recorded: 2011-09-08
Pages: 6
Assignors
TEL, WIM TJIBBO
Executed: 2011-09-01
PRIL, WOUTER ONNO
Executed: 2011-08-22
THEEUWES, THOMAS
Executed: 2011-08-12
PADIY, ALEXANDER VIKTOROVYCH
Executed: 2011-08-22
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Method of Calibrating a Lithographic Apparatus, Device Manufacturing Method and Associated Data Processing Apparatus and Computer Program Product