Patent Assignment
Reel/Frame 026887/0304
Assignment of Assignor's Interest
Recorded: 2011-09-12
Pages: 4
Assignors
SUGIURA, SHINOBU
Executed: 2011-08-11
UENO, MASAAKI
Executed: 2011-08-11
TANAKA, KAZUO
Executed: 2011-08-11
SUGISHITA, MASASHI
Executed: 2011-08-11
YAMAGUCHI, HIDETO
Executed: 2011-08-11
SHIRAKO, KENJI
Executed: 2011-08-11
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOYKO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus Capable of Switching Control Mode of Heater
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.