Patent Assignment
Reel/Frame 026891/0864
Assignment of Assignor's Interest
Recorded: 2011-09-13
Pages: 3
Assignors
SHIH, CHI-YUAN
Executed: 2011-08-02
HUANG, I-HSIUNG
Executed: 2011-08-03
LIU, HENG-HSIN
Executed: 2011-08-03
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN ROAD 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Overlay Alignment Mark and Method of Detecting Overlay Alignment Error Using the Mark