Patent Assignment
Reel/Frame 026906/0326
Assignment of Assignor's Interest
Recorded: 2011-09-14
Pages: 6
Assignors
VAN DER SCHAAR, MAURITS
Executed: 2011-08-12
DEN BOEF, ARIE JEFFREY
Executed: 2011-08-25
MOS, EVERHARDUS CORNELIS
Executed: 2011-09-06
FUCHS, ANDREAS
Executed: 2011-07-28
COOGANS, MARTYN JOHN
Executed: 2011-07-25
SMILDE, HENDRIK JAN HIDDE
Executed: 2011-07-21
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Inspection Apparatus and Method for Measuring a Property of a Substrate