Patent Assignment
Reel/Frame 026931/0633
Assignment of Assignor's Interest
Recorded: 2011-09-20
Pages: 2
Assignors
HERTGENS, ANDREAS
Executed: 2011-09-20
MUELLER, TORSTEN
Executed: 2011-09-20
WALTNER, PAUL
Executed: 2011-09-19
Assignee
AES MOTOMATION GMBH
NIKOLAUS-OTTO-STRASSE 8, MEERBUSCH, D-40670, GERMANY
Covered Property
(1)
Method for Automatic Measurement and for Teaching-in of Location Positions of Objects Within a Substrate Processing System by Means of Sensor Carriers and Associated Sensor Carrier