Patent Assignment
Reel/Frame 026939/0698
Assignment of Assignor's Interest
Recorded: 2011-09-21
Pages: 4
Assignors
MONDEN, TAICHI
Executed: 2011-09-12
KITAGAWA, JUNICHI
Executed: 2011-09-12
YAMASHITA, JUN
Executed: 2011-09-12
NAKAMURA, HIDEO
Executed: 2011-09-12
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method