Patent Assignment
Reel/Frame 026946/0545
Assignment of Assignor's Interest
Recorded: 2011-09-22
Pages: 3
Assignor
KLEINSCHMIDT, JUERGEN
Executed: 2011-09-21
Assignee
XTREME TECHNOLOGIES GMBH
15 STEINBACHSTRASSE, AACHEN, 52074, GERMANY
Covered Property
(1)
Method and Apparatus for the Generation of Euv Radiation from a Gas Discharge Plasma
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.