Patent Assignment
Reel/Frame 026950/0426
Assignment of Assignor's Interest
Recorded: 2011-09-22
Pages: 3
Assignors
SAKAMOTO, KEITARO
Executed: 2011-08-29
NOMURA, FUMIYASU
Executed: 2011-08-29
KOMORI, TSUNENORI
Executed: 2011-09-02
Assignee
TORAY INDUSTRIES, INC.
1-1, NIHONBASHI-MUROMACHI 2-CHOME, CHUO-KU, TOKYO, 1038666, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Method of Producing Amorphous Silicon Thin Film Using Same