Patent Assignment
Reel/Frame 027002/0278
Assignment of Assignor's Interest
Recorded: 2011-09-30
Pages: 4
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Overlay Measurement for a Double Patterning