Patent Assignment
Reel/Frame 027003/0785
Assignment of Assignor's Interest
Recorded: 2011-10-03
Pages: 2
Assignor
TAKAHASHI, AKIRA
Executed: 2011-09-16
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Substrate Carrying Mechanism, Substrate Processing Apparatus, and Semiconductor Device Manufacturing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.