Patent Assignment
Reel/Frame 027010/0808
Assignment of Assignor's Interest
Recorded: 2011-10-04
Pages: 10
Assignors
NOZAWA, TOSHIHISA
Executed: 2011-09-19
SASAKI, MASARU
Executed: 2011-09-19
HASHIMOTO, JUN
Executed: 2011-09-19
YOSHIMURA, SHOTA
Executed: 2011-09-19
OZU, TOSHIHISA
Executed: 2011-09-19
NISHIZUKA, TETSUYA
Executed: 2011-09-21
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Etching Apparatus, Plasma Etching Method, and Semiconductor Device Manufacturing Method