Patent Assignment
Reel/Frame 027039/0480
Assignment of Assignor's Interest
Recorded: 2011-10-11
Pages: 2
Assignors
OKUMURA, TOMOHIRO
Executed: 2011-07-27
NAKAYAMA, ICHIRO
Executed: 2011-08-02
KAWAURA, HIROSHI
Executed: 2011-07-29
YUKIMOTO, TETSUYA
Executed: 2011-07-29
Assignee
PANASONIC CORPORATION
1006 OAZA KADOMA, KADOMA-SHI, OSAKA, 571-8501, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Method Thereof