Patent Assignment
Reel/Frame 027052/0511
Assignment of Assignor's Interest
Recorded: 2011-10-13
Pages: 3
Assignors
HAYAMA, TAKAHIRO
Executed: 2011-09-08
KUSABIRAKI, KAZUNORI
Executed: 2011-09-08
NISHIMURA, YUKIO
Executed: 2011-09-09
MARUYAMA, KEN
Executed: 2011-10-04
TANAKA, KIYOSHI
Executed: 2011-09-08
Assignee
JSR CORPORATION
1-9-2, HIGASHI-SHINBASHI, MINATO-KU, TOKYO, 105-8640, JAPAN
Covered Property
(1)
Liquid Immersion Lithography Upper-Layer Film-Forming Composition and Photoresist Pattern-Forming Method
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.