Patent Assignment
Reel/Frame 027052/0775
Assignment of Assignor's Interest
Recorded: 2011-10-13
Pages: 3
Assignor
JANG, YONG-JUN
Executed: 2011-10-05
Assignee
JUSUNG ENGINEERING CO., LTD.
49 NEUNGPYEONG-RI, OPO-EUP,, GWANGJU-SI, GYUNGGI-DO, 464-892, KOREA, REPUBLIC OF
Covered Property
(1)
Antenna Unit for Generating Plasma and Substrate Processing Apparatus Including the Same