Patent Assignment
Reel/Frame 027065/0549
Assignment of Assignor's Interest
Recorded: 2011-09-20
Pages: 2
Assignee
NIKON CORPORATION
12-1, YURAKUCHO 1-CHOME, CHIYODA-KU, TOKYO, 100-8331, JAPAN
Covered Property
(1)
Illumination Optical System, Exposure Apparatus, and Device Manufacturing Method