Patent Assignment
Reel/Frame 027068/0534
Assignment of Assignor's Interest
Recorded: 2011-10-17
Pages: 2
Assignors
ASAI, MASAYUKI
Executed: 2011-09-26
HONDA, KOICHI
Executed: 2011-09-26
UMEMOTO, MAMORU
Executed: 2011-09-26
OKUDA, KAZUYUKI
Executed: 2011-09-26
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Semiconductor Device Manufacturing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.