Patent Assignment
Reel/Frame 027070/0553
Assignment of Assignor's Interest
Recorded: 2011-10-17
Pages: 4
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Particle Distribution Analysis Method for Computer Readable Storage Medium for Storing Program for Executing the Method