Patent Assignment
Reel/Frame 027077/0616
Assignment of Assignor's Interest
Recorded: 2011-10-18
Pages: 3
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, 100-0005, JAPAN
Covered Property
(1)
Pellicle for Lithography and Manufacturing Method Thereof