Patent Assignment
Reel/Frame 027080/0160
Assignment of Assignor's Interest
Recorded: 2011-10-18
Pages: 4
Assignors
CHANG, FENG-MING
Executed: 2011-10-12
YANG, CHANG-TA
Executed: 2011-10-12
WANG, PING-WEI
Executed: 2011-10-12
CAO, MIN
Executed: 2011-10-12
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN ROAD 6, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Multiple Patterning Technology Method and System for Achieving Minimal Pattern Mismatch