Patent Assignment
Reel/Frame 027080/0845
Assignment of Assignor's Interest
Recorded: 2011-10-18
Pages: 4
Assignors
TU, CHE-HAO
Executed: 2011-10-14
HONG, WEILUN
Executed: 2011-10-14
CHEN, YING-TSUNG
Executed: 2011-10-14
CHEN, LIANG-GUANG
Executed: 2011-10-14
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., ("TSMC")
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Planarization Process for Semiconductor Device Fabrication