Patent Assignment
Reel/Frame 027088/0727
Assignment of Assignor's Interest
Recorded: 2011-10-19
Pages: 3
Assignors
SUN, JENNIFER
Executed: 2011-10-18
BANDA, SUMANTH
Executed: 2011-10-18
DUAN, REN-GUAN
Executed: 2011-10-18
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Electrostatic Chuck and Showerhead with Enhanced Thermal Properties and Methods of Making Thereof