Patent Assignment
Reel/Frame 027109/0705
Assignment of Assignor's Interest
Recorded: 2011-10-24
Pages: 3
Assignor
LIU, JI-FENG
Executed: 2011-09-27
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Dielectric Film Defect Reduction