Patent Assignment
Reel/Frame 027111/0931
Assignment of Assignor's Interest
Recorded: 2011-10-21
Pages: 9
Assignors
ABHARI, REZA
Executed: 2011-03-15
GIOVANNINI, ANDREA
Executed: 2011-03-15
ROLLINGER, BOB
Executed: 2011-03-15
BLEINER, DAVIDE
Executed: 2011-03-15
Assignee
ETH ZURICH
RAEMISTRASSE 101, CH-8092 ZURICH, SWITZERLAND
Covered Property
(1)
Extreme Ultraviolet Light Source with a Debris-Mitigated and Cooled Collector Optics