Patent Assignment
Reel/Frame 027122/0710
Assignment of Assignor's Interest
Recorded: 2011-10-26
Pages: 2
Assignors
HOFFMANN, STEPHAN
Executed: 2011-10-20
KRAUS, HARALD
Executed: 2011-10-17
METTIN, GUNTER
Executed: 2011-10-19
Assignee
LAM RESEARCH AG
SEZ STRASSE 1, VILLACH, A-9500, AUSTRIA
Covered Property
(1)
Method and Apparatus for Processing Wafer-Shaped Articles