Patent Assignment
Reel/Frame 027127/0118
Assignment of Assignor's Interest
Recorded: 2011-10-26
Received: 2011-10-26
Pages: 3
Assignor
DUNTON, SAMUEL VANCE
Executed: 1999-06-28
Assignee
VLSI TECHNOLOGY, INC.
1109 MCKAY DRIVE, SAN JOSE, CA, 95131, UNITED STATES
Covered Property
(1)
Laser Interferometry Endpoint Detection with Windowless Polishing Pad for Chemical Mechanical Polishing Process
Application:
09/805,860 →