IP Library › Granted Patent US 6,565,416
Granted Patent Utility
US 6,565,416 · Confirmation No. 4106

LASER INTERFEROMETRY ENDPOINT DETECTION WITH WINDOWLESS POLISHING PAD FOR CHEMICAL MECHANICAL POLISHING PROCESS

Patented Case View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2001-03-13 TRNA Transmittal of New Application 2 View
2001-03-13 A.PE Preliminary Amendment 12 View
2001-03-13 SPEC Specification 14 View
2001-03-13 CLM Claims 10 View
2001-03-13 ABST Abstract 1 View
2001-03-13 DRW Drawings-only black and white line drawings 3 View
2001-03-13 OATH Oath or Declaration filed 2 View
2001-03-13 TRNA Transmittal of New Application 2 View
2001-03-13 A.PE Preliminary Amendment 12 View
2001-03-13 SPEC Specification 14 View
2001-03-13 CLM Claims 10 View
2001-03-13 ABST Abstract 1 View
2001-03-13 DRW Drawings-only black and white line drawings 3 View
2001-03-13 OATH Oath or Declaration filed 2 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
Patent No.
US 6,565,416
App. No.
09/805,860
Filed
2001-03-13
Granted
2003-05-20
Pub. No.
US20010009838A1
Art Unit
3724
PTA
0 days