Patent Assignment
Reel/Frame 027129/0257
Change of Name
Recorded: 2011-10-26
Received: 2011-10-26
Pages: 4
Assignor
PHILIPS SEMICONDUCTORS VLSI INC.
Executed: 1999-12-20
Assignee
PHILIPS SEMICONDUCTORS INC.
1251 AVENUE OF THE AMERICAS, NEW YORK, NY, 10020, UNITED STATES
Covered Property
(1)
Laser Interferometry Endpoint Detection with Windowless Polishing Pad for Chemical Mechanical Polishing Process
Application:
09/805,860 →