Patent Assignment
Reel/Frame 027127/0307
Change of Name
Recorded: 2011-10-26
Received: 2011-10-26
Pages: 4
Assignor
VLSI TECHNOLOGY, INC.
Executed: 1999-07-02
Assignee
PHILIPS SEMICONDUCTORS VLSI INC.
1251 AVENUE OF THE AMERICAS, NEW YORK, NY, 10020, UNITED STATES
Covered Property
(1)
Laser Interferometry Endpoint Detection with Windowless Polishing Pad for Chemical Mechanical Polishing Process
Application:
09/805,860 →