Patent Assignment
Reel/Frame 027149/0940
Assignment of Assignor's Interest
Recorded: 2011-10-31
Pages: 8
Assignors
ROSTALSKI, HANS-JUERGEN
Executed: 2011-10-12
SCHWERTNER, TILMAN
Executed: 2011-10-04
EPPLE, ALEXANDER
Executed: 2011-10-07
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Optical Arrangement in a Projection Objective of a Microlithographic Projection Exposure Apparatus