Patent Assignment
Reel/Frame 027159/0678
Assignment of Assignor's Interest
Recorded: 2011-11-02
Pages: 3
Assignor
SHIMADA, KOICHI
Executed: 2011-10-20
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Assembly Method for Vacuum Processing Apparatus