Patent Assignment
Reel/Frame 027175/0131
Assignment of Assignor's Interest
Recorded: 2011-11-04
Pages: 4
Assignors
GAO, JUWEN
Executed: 2011-09-21
JAKKARAJU, RAJKUMAR
Executed: 2011-09-23
DANEK, MICHAL
Executed: 2011-09-21
LEI, WEI
Executed: 2011-09-21
Assignee
NOVELLUS SYSTEMS, INC.
4000 N. FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Systems and Methods for Selective Tungsten Deposition in Vias